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1

SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Advances in Resist Technology and Processing VII - Chemically amplified resists for I-line and G-line applications

Berry, Amanda K., Feely, Wayne E., Thompson, Stephen D., Calabrese, Gary S., Sinta, Roger F., Lamola, Angelo A., Thackeray, James W., Orsula, George W., Watts, Michael P. C.

Year:

1990

Language:

english

File:

PDF, 453 KB

english, 1990

2

SPIE Proceedings [SPIE 1986 Microlithography Conferences - Santa Clara (Monday 10 March 1986)] Advances in Resist Technology and Processing III - Microplastic Structures

Feely, Wayne E., Willson, C. Grant

Year:

1986

Language:

english

File:

PDF, 18.99 MB

english, 1986

3

SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Advances in Resist Technology and Processing IV - Processing Photostructural Materials

Rosenblatt, David J., Zemel, Jay N., Feely, Wayne E. .., Bowden, Murrae J.

Year:

1987

Language:

english

File:

PDF, 13.18 MB

english, 1987

4

Additions and Corrections: Amine Oxides. Cyclic Quaternary Salts and their Decomposition

Boekelheide, V, Feely, Wayne

Journal:

Journal of the American Chemical Society

Year:

1959

Language:

english

File:

PDF, 112 KB

english, 1959

5

Amine Oxides. Cyclic Quaternary Salts and their Decomposition 1

Boekelheide, V., Feely, Wayne

Journal:

Journal of the American Chemical Society

Year:

1958

Language:

english

File:

PDF, 532 KB

english, 1958

6

SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Electron-Beam, X-Ray, and Ion-Beam Lithographies VI - Aqueous Base Developed, Single Level Resist For Submicron X-Ray Lithography

Tai, Elizabeth, Fay, Bernard, Stein, Cynthia M., Feely, Wayne E., Blais, Phillip D.

Year:

1987

Language:

english

File:

PDF, 7.12 MB

english, 1987

7

The role of the latent image in a new dual image, aqueous developable, thermally stable photoresist

Wayne E. Feely, Joann C. Imhof, Cynthia M. Stein

Journal:

Polymer Engineering & Science

Year:

1986

Language:

english

File:

PDF, 761 KB

english, 1986

8

Additions and Corrections - A Convenient Synthesis of Pyrrocoline

Boekelheide, V., Feely, Wayne

Journal:

Journal of Organic Chemistry

Year:

1957

Language:

english

File:

PDF, 96 KB

english, 1957

9

Notes - Convenient Synthesis of Pyrrocoline

Boekelheide, V., Feely, Wayne

Journal:

Journal of Organic Chemistry

Year:

1957

Language:

english

File:

PDF, 448 KB

english, 1957

10

Cyanation of Amine Oxide Salts. A New Synthesis of Cyanopyridines

Feely, Wayne E., Beavers, Ellington M.

Journal:

Journal of the American Chemical Society

Year:

1959

Language:

english

File:

PDF, 506 KB

english, 1959

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